Institute of Physics of Materials AS CR, v. v. i. > Projects > Synthesis of carbon micro- and nanostructures by plasma technologies

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Synthesis of carbon micro- and nanostructures by plasma technologies

Anotace

The growth of carbon nanotubes (CNTs) and nanofibers (CNFs) is studied by plasma enhanced CVD and different discharges (microwave, r.f. CCP and ICP, modified magnetron sputtering system) are compared. The aim is also to produce CNTs at low temperatures, in atmospheric pressure discharges and to growth single-walled nanotubes. Moreover, the synthesis of carbon nanostructures, e.g. structured polymers, CNTs and fullerenes, in pulsed radio frequency glow discharges is carried out. The influence of the pulse duration on the deposition is investigated. The micro- and nanocrystalline diamond is deposited by PECVD and its propertiesare controlled by changing the crystallite size and dopping by other elements, e.g. boron. The nanocomposite films containing CNTs and CNFs are prepared by PECVD. The films are studied regarding their mechanical, optical and electrical properties. The discharges used for the processes will be investigated by optical emission spectroscopy, mass spectrometry and Langmuir probe. The deposits will be characterized by TEM and SEM, AFM, FTIR and Raman spectroscopy, RBS and ERDA, XPS, XRD.