Institute of Physics of Materials AS CR, v. v. i. > Projects > Nucleation and growth of oxygen precipitates in silicon
Nucleation and growth of oxygen precipitates in silicon
Co-investigator | RNDr. Jiří Buršík, CSc., DSc. |
Number of Project | 202/09/1013 |
Agency | Grantová agentura České republiky |
Duration | 2008-12-31 - 2011-12-30 |
Anotace |
The project is devoted to a complex study of nucleation and growth of oxygen precipitates in Czochralskigrown silicon crystals. A broad range of experimental methods will be applied: x-ray scattering, infrared absorption spectroscopy, wet etching, optical microscopy and transmission electron microscopy; their results will be compared in detail. These methods will allow us to characterize both globally and locally the distribution of precipitates (size, density of clusters) and of the associated defects (crystal lattice deformation) in samples subjected to controlled annealing processes. The experimental results will be compared with theoretical modeling based on theories of nucleation and growth, going beyond the classical theory of nucleation. The numerical analysis will further allow us to determine the associated material constants needed for appropriate numerical modeling of the precipitate growth. The prediction and understanding of precipitation processes kinetics will lead to development of recipes for annealing treatments with controlled sample parameters. |