Institute of Physics of Materials AS CR, v. v. i. > List of facilities > Tergeo plasma cleaner

Tergeo plasma cleaner

Compact cleaner designed for SEM specimen cleaning, activating functional groups on polymers, metals, and ceramics, achieving hydrophilic wettability, improving bonding strength and printability, etc.

Specification: 150 W, 13.56 MHz Tergeo with automatic impedance matching, two MFC regulated process gas inputs (e.g. Air, Argon, Oxygen is available), a pressure sensor, dust filter and rotary vane vacuum pump filled with inert Krytox 1514 PFPE pump oil. Compatible for oxygen service. Minimum pressure of 5-15mTorr. Thick-wall quartz tube (5mm thickness) with inner diameter 110mm and depth 280mm.