Tergeo plasma cleaner
Compact cleaner designed for SEM specimen cleaning, activating functional groups on polymers, metals, and ceramics, achieving hydrophilic wettability, improving bonding strength and printability, etc.
Specification: 150 W, 13.56 MHz Tergeo with automatic impedance matching, two MFC regulated process gas inputs (e.g. Air, Argon, Oxygen is available), a pressure sensor, dust filter and rotary vane vacuum pump filled with inert Krytox 1514 PFPE pump oil. Compatible for oxygen service. Minimum pressure of 5-15mTorr. Thick-wall quartz tube (5mm thickness) with inner diameter 110mm and depth 280mm.