Scios2 DualBeam with FEG electron source and FIB - Scanning electron microscope
The Thermo ScientificTM Scios 2 DualBeam is an ultra-high-resolution analytical focused ion beam scanning electron microscopy (FIB-SEM) system.
The Thermo ScientificTM scanning electron microscope Scios 2 DualBeam is equipped with in-beam and chamber detectors. The system is equipped with FIB which, among other things, allows in combination with gas injection system (GIS allowing deposition of C and W), and a nanomanipulator material milling, 3D FIB-SEM tomography and almost automatic preparation of TEM lamellas. The segmented BSE chamber detector is suitable for maximum materials contrast, EDS detector and AZtec software for chemical analysis and the STEM detector allows the imaging of the internal structure of TEM samples or nanostructures. Techniques: SE, BSE, in-beam SE, in-beam BSE, EDS, STEM-BF, STEM-DF, STEM-HAADF, FIB
