Institute of Physics of Materials AS CR, v. v. i. > List of facilities > Scios2 DualBeam with FEG electron source and FIB - Scanning electron microscope

Scios2 DualBeam with FEG electron source and FIB - Scanning electron microscope

Contactdoc. Ing. Stanislava Fintová, Ph.D.

The Thermo ScientificTM Scios 2 DualBeam is an ultra-high-resolution analytical focused ion beam scanning electron microscopy (FIB-SEM) system.

The SEM can operate at 30 keV in STEM mode (to access structural information) as well as lower energies (to obtain charge-free, detailed surface information). The system allows 3D characterization performance for a wide range of samples, including magnetic and non-conductive materials, including backscattered electron (BSE) imaging for maximum materials contrast, energy-dispersive spectroscopy (EDS) for compositional information. FIB in combination with GIS and a nanomanipulator is suitable for material milling and preparation of TEM lamellas.   Techniques:  SE, BSE, in-beam SE, in-beam BSE, EDS, STEM-BF, STEM-DF, FIB