Institute of Physics of Materials AS CR, v. v. i. > List of facilities > Scanning electron microscope Tescan LYRA 3 XMU FEG/SEMxFIB

Scanning electron microscope Tescan LYRA 3 XMU FEG/SEMxFIB

Scanning electron microscope Tescan LYRA 3 XMU FEG/SEMxFIB with FEG electron source.

This electron microscope is equipped also with a focussed ion beam column, micromanipulator and a gas injection system. It can work also in low vacuum mode. The device is equipped with X-Max80 EDS detector for X-ray microanalysis and EBSD detector by Oxford Instruments with Aztec control system.