Institute of Physics of Materials AS CR, v. v. i. > List of facilities > Scanning electron microscope Tescan LYRA 3 XMU FEG/SEMxFIB

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Scanning electron microscope Tescan LYRA 3 XMU FEG/SEMxFIB

Scanning electron microscope Tescan LYRA 3 XMU FEG/SEMxFIB with FEG electron source.

Scanning electron microscope Tescan LYRA 3 XMU FEG/SEMxFIB is equipped with EBSD Symmetry for crystallographic analysis and EDS Ultimmax detectors and AZtec software for chemical analysis. The microscope also offers a FIB, allowing imaging and milling of the material by high-energy gallium ions. FIB, in combination with micromanipulator and gas injection system (GIS allowing deposition of Pt and W), can be adopted also for TEM samples preparation.   Techniques: SE, BSE, EDS, EBSD, FIB, GIS