Institute of Physics of Materials AS CR, v. v. i. > List of facilities > Scanning electron microscope Tescan LYRA 3 XMH FEG/SEMxFIB

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Scanning electron microscope Tescan LYRA 3 XMH FEG/SEMxFIB

Tescan LYRA 3 XMH FEG/SEM scanning electron microscope with a FEG electron source.

The microscope is equipped EDS X-Max detector and AZtec software. Microscope offers also focused ion beam source (FIB) allowing imaging and milling of the material via high-energy gallium ions. FIB, in combination with micromanipulator and gas injection system, can be adopted also for preparation of TEM samples. The AFM system Nenovision can be introduced in to microscope chamber and simultaneous acquisition of AFM and SEM signal is possible. Techniques: SE, BSE, in-beam SE, in-BSE, STEM-BF, STEM-DF, EDS, FIB, GIS, AFM