Institute of Physics of Materials AS CR, v. v. i. > List of facilities > Scanning electron microscope Tescan LYRA 3 XMH FEG/SEM

Scanning electron microscope Tescan LYRA 3 XMH FEG/SEM

Scanning electron microscope with FEG electron source.

The microscope is equipped with X-Max80 EDS detector for X-ray microanalysis by Oxford Instruments, de-contaminator/plasma cleaner, in lens detectors, transmitted electron detector and beam deceleration technology.