Scanning electron microscope Tescan LYRA 3 XMH FEG/SEMxFIB
Tescan LYRA 3 XMH FEG/SEMxFIB scanning electron microscope is besides chamber SE and BSE detectors equipped also by in-beam SE, in-beam BSE and STEM detectors.
The microscope also offers FIB, allowing imaging and milling of the material by high-energy gallium ions. FIB, in combination with micromanipulator and gas injection system (GIS allowing deposition Pt and W), can be adopted also for TEM samples preparation. The microscope is equipped with EDS X-Max detector and AZtec software for analysis and quantification of chemical composition. The AFM system Nenovision LiteScope can be placed into the microscope chamber, allowing for the simultaneous acquisition of AFM and SEM signals. Techniques: SE, BSE, in-beam SE, in-beam BSE, STEM-BF, STEM-DF, EDS, FIB, GIS, AFM
