Institute of Physics of Materials AS CR, v. v. i. > List of facilities > Phenom XL

Phenom XL

Contactdoc. Ing. Stanislava Fintová, Ph.D.

The ThermoFisher Scientific Phenom XL Desktop SEM system with a long lifetime thermionic source (CeB6) offers SE detector that enables surface sensitive imaging, four-segment BE detector that yields sharp images and provides chemical contrast information and a fully integrated EDS system for elemental analysis. ChemiSEM software generates real-time color-coded elemental maps directly over the SEM live image. Combining SEM and EDS, the software delivers ultra-fast and dynamically integrated results. The system also provides Maps 3 software, correlative electron microscopy and cross-platform imaging automation software. The microscope allows to analyze large samples up to 100×100 mm at a resolution of 10 nanometers.   Techniques: SE, BSE, EDS