Institute of Physics of Materials AS CR, v. v. i. > List of facilities > Apreo ChemiSEM with FEG electron source - Scanning electron microscope

Apreo ChemiSEM with FEG electron source - Scanning electron microscope

Contactdoc. Ing. Stanislava Fintová, Ph.D.

ThermoFisher ScientificTM ChemiSEM system is equipped by in-beam and chamber detectors. The hybrid pixelated TruePix Direct Electron Detection EBSD is a high-speed, high-sensitivity direct electron detection system that provides comprehensive EBSD acquisition and data processing. TrueSight LX EDS detector with ChemiPhase, enabling accurate identification of material phases with pixel-perfect precision, and offering live acquisition via a novel data segmentation approach.

The system also possesses a possibility to heat (high-vacuum heating stage, up to 1000 °C) or mechanically pull (tensile module system with narrow spindle distance 38mm (EBSD-capable) with a capacity up to 5 kN) samples and perform in-situ experiments.   Techniques: SE, BSE, in-beam SE, in-beam BSE, STEM-BF, STEM-DF, STEM-HAADF, EBSD, EDS, in-situ heating stage, in-situ loading stage